When one of the VMs suspend, it display something like "disk space not enough", so I delete some folder which seem not related to that VM, but after that, this VM can no longer power on. 
The error message is "The partition table on the physical disk has changed since the disk was created ...", how to fix that?
It had some snapshots, the VM folder has a lot vmdk files, one vmxf, one vmsd, one vmsn, and vmx.lck folder.